Simple and versatile heterodyne whole-field interferometer for phase optics characterization
نویسندگان
چکیده
منابع مشابه
Simple heterodyne laser interferometer with subnanometer periodic errors.
We describe a simple heterodyne laser interferometer that has subnanometer periodic errors and is applicable to industrial fields. Two spatially separated beams can reduce the periodic errors, and the use of a right-angle prism makes the optical configuration much simpler than previous interferometers. Moreover, the optical resolution can be enhanced by a factor of 2, because the phase change d...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2012
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4757396